On July 16, 1992, the initial list of categories of major sources that will be regulated under section 112 was published in the Federal Register (57 FR 31576). “Semiconductor Manufacturing” was included in the list as a category of major sources.
The semiconductor manufacturing national emission standards for hazardous air pollutants (NESHAP) project will establish standards for semiconductor manufacturing facilities that are major sources.
The purpose of this February 2001 document is to summarize the background information gathered during the development of the semiconductor manufacturing NESHAP.
For more information on the rule, visit the regulation page for Semiconductor Manufacturing: National Emission Standards for Hazardous Air Pollutants (NESHAP).
You will need Adobe Reader to view some of the files on this page. See EPA’s About PDF page to learn more.