Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report

This report describes perfluorocompound (PFC) technology development and implementation and the semiconductor industry's efforts to reduce PFC emissions.

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Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report (PDF)(80 pp, 619 K)