10 min | 30 min | 60 min | 4 hr | 8 hr | |
---|---|---|---|---|---|
ppm | |||||
AEGL 1 | 0.45 | 0.45 | 0.45 | 0.45 | 0.45 |
AEGL 2 | 25 | 11 | 5.5 | 2.8 | 2.8 |
AEGL 3 | 160 | 53 | 25 | 6.5 | 6.5 |
- Chlorosilanes AEGL Technical Support Document (PDF)(87 pp, 574 K)
10 min | 30 min | 60 min | 4 hr | 8 hr | |
---|---|---|---|---|---|
ppm | |||||
AEGL 1 | 0.45 | 0.45 | 0.45 | 0.45 | 0.45 |
AEGL 2 | 25 | 11 | 5.5 | 2.8 | 2.8 |
AEGL 3 | 160 | 53 | 25 | 6.5 | 6.5 |