| 10 min | 30 min | 60 min | 4 hr | 8 hr | |
|---|---|---|---|---|---|
| (ppm) | |||||
| AEGL 1 | 0.90 | 0.90 | 0.90 | 0.90 | 0.90 |
| AEGL 2 | 50 | 22 | 11 | 5.5 | 5.5 |
| AEGL 3 | 310 | 110 | 50 | 13 | 13 |
- Chlorosilanes AEGL Technical Support Document (PDF)(87 pp, 574 K)
| 10 min | 30 min | 60 min | 4 hr | 8 hr | |
|---|---|---|---|---|---|
| (ppm) | |||||
| AEGL 1 | 0.90 | 0.90 | 0.90 | 0.90 | 0.90 |
| AEGL 2 | 50 | 22 | 11 | 5.5 | 5.5 |
| AEGL 3 | 310 | 110 | 50 | 13 | 13 |